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Agilent IDP-3 Oil Free Vacuum Pump

The Agilent IDP-3 oil-free dry scroll pump is designed to provide reliable vacuum for selected single quadrupole GC-MS systems. It operates using a dual scroll mechanism in which one scroll orbits within a fixed scroll to progressively capture, compress, and discharge gas from the pump inlet to the exhaust. This configuration enables stable vacuum generation with a low ultimate pressure and consistent pumping performance, supporting efficient turbo pump operation and overall system reliability. The hermetic design positions the motor and bearings outside the vacuum space, preventing contact between pumped gases and mechanical components.

With a pumping speed of 60 L/min (3.6 m³/h), the IDP-3 is qualified for use with instruments such as the Agilent 5973, 5975, and 5977 GC-MS systems. The dry pump design removes the need for oil management, reducing routine servicing requirements to periodic replacement of tip seals and an O-ring. Its compact footprint, low vibration characteristics, and modest power demand make it suitable for installation within instrument cabinets or laboratory environments where space and noise levels are important considerations.

Part Number Product Description Price Qty
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Features

  • Dual Scroll Pumping Mechanism – Captures and compresses gas in moving pockets to deliver stable vacuum performance
  • 60 L/min Pumping Speed – Provides appropriate capacity for compatible single quadrupole GC-MS systems
  • Hermetically Sealed Drive Assembly – Motor and bearings are isolated from the vacuum path to minimise contamination risk
  • Oil-Free Operation – Eliminates hydrocarbon backstreaming, oil disposal requirements, and associated maintenance tasks
  • Simplified Maintenance Procedure – Routine servicing limited to periodic replacement of scroll tip seals and sealing components

Specification

  IDP-3 Oil Free Vacuum Pump
Peak pumping speed 60 L/m, 3.6 m3/hr, 2.1 cfm
Ultimate pressure 2.5 x 10-1 torr (3.3 x 10-1 mbar, 33 Pa)
Maximum inlet pressure 1 atmosphere (1.0 bar, 101 kPa)
Maximum outlet pressure 1.4 atmospheres (1.4 bar, 142 kPa)
Inlet connection NW16 KF flange
Exhaust connection Female 3/8 inch NPT
Gas ballast connection Female 1/8 inch NPT
Ambient operating temperature 5 to 40°C
Storage temperature -20 to 60°C
Motor rating 0.16 HP (0.12 KW; peak rating: 0.27 HP (0.20 KW)
Supply power 24V DC, +/-10%, 7 FLA
Motor thermal protection Automatic
Rotation speed 3200 RPM
Cooling Air-cooled
Weight 9.5 kg
Dimensions Width: 18.1 cm
Length: 14.0 cm
Height: 35.8cm
Restrictions No corrosive, explosive, or particulate-forming gases
Leak rate <1 x 10−6 std-cc/sec helium
Noise level (per ISO 11201) 55 dB(A)
Vibration level at inlet (per ISO 10816-1) 1.5 mm/second
Compliance Conforms with CE, CSA, CSA/CUS, Semi S2-703, and RoHS

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Literature

Clean, quiet and reliable oil-free pumps suitable for use with GC-MS
IDP oil free dry pumps - clean, compact, and cost-effective alternative to conventional oil-sealed pumps